During the past few years, there has been an increasing demand in the
field of precision engineering for fine motion in multi-degrees of freedom
systems. These applications motivated the development of a new robotics field
called microrobotics. In this paper, we review both the design guidelines for
microrobots and the advantages of using parallel robots in very high precision
applications. Parallel micromanipulators using elastic joints as well as
structures manufactured in single solid and metallic bellows are
introduced.